Browse "ME-Journal Papers(저널논문)" by Author Won, Imhee
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| TCAD augmented generative adversarial network for hot-spot detection and mask-layout optimization in a large area HARC etching process Kwon, Hyoungcheol; Huh, Hyunsuk; Seo, Hwiwon; Han, Songhee; Won, Imhee; Sue, Jiwoong; Oh, Dongyean; et al, PHYSICS OF PLASMAS, v.29, no.7, 2022-07 |
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