Showing results 1 to 4 of 4
Analysis of additional leakage resulting from the feeding motion of a vacuum-compatible air bearing stage Khim, Gyungho; Park, Chun-Hong; Lee, Husang; Kim, Seung-Woo, VACUUM, v.81, no.4, pp.466 - 474, 2006-11 |
Development of magnetically preloaded air bearings for a linear slide: Active compensation of three degrees of freedom motion errors Ro, Seung-Kook; Kim, Soohyun; Kwak, Yoon Keun; Park, Chun-Hong, REVIEW OF SCIENTIFIC INSTRUMENTS, v.79, no.3, 2008-03 |
Estimation method for errors of an aerostatic planar XY stage based on measured profiles errors Hwang, Jooho; Park, Chun-Hong; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, v.46, no.9-12, pp.877 - 883, 2010-02 |
Estimation of 2D position and flatness errors for a planar XY stage based on measured guideway profiles Hwang, Jooho; Park, Chun-Hong; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.8, no.2, pp.64 - 69, 2007-04 |
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