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Measurement of Sub-micrometer Features Based on The Topographic Contrast Using Reflection Confocal Microscopy Lee, SeungWoo; Kang, DongKyun; Yoo, Hongki; Kim, TaeJoong; Gweon, Dae-Gab; Lee, Suk-Won; Kim, Kwang-Soo, Current Optics and Photonics, v.9, no.1, pp.26 - 31, 2005-03 |
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