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Design of a Six-Degree-of-Freedom Motion Fine Stage Driven by Voice Coil Motors with Flexural Guides

Jeong, Jae-heon; Kim, Myeong-hyeon; Woo, Siwoong; Gweon, Dae-Gab; Ahn, Dahoon; Hong, Dongpyo, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.16, no.1, pp.203 - 207, 2015-01

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