Showing results 1 to 1 of 1
Capacitive type surface-micromachined silicon accelerometer with stiffness tuning capability Park, KY; Lee, Chong-Won; Jang, HS; Oh, Y; Ha, B, SENSORS AND ACTUATORS A-PHYSICAL, v.73, no.1-2, pp.109 - 116, 1999-03 |
Discover