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VCM을 이용한 나노 정밀도 스캐닝 용 초정밀 이중 스테이지

Kim, Ki Hyun; Choi, Young Man; Kim, Dong Min; Nam, Byoung Uk; Lee, Suk Won; Lee, Moon Gu; Gweon, Dae Gab, Journal of the Korean Society for Precision Engineering, Vol.22, No.5, 2005-05

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