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Browse "ME-Journal Papers(저널논문)" by Author Koo, Namil

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1	Volatile vapor knife of immersion lithography hood using solutal Marangoni effect Ryu, Junil; Lee, Gilgu; Lee, Won Ki; Yoon, Jong Min; Koo, Namil; Kim, Hyoungsoo, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.40, no.5, 2022-09

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