Browse "ME-Journal Papers(저널논문)" by Subject BRITTLE

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Surfactant-controlled damage evolution during chemical mechanical planarization of nanoporous films

Kim, Taek-Soo; Konno, Tomohisa; Dauskardt, Reinhold H., ACTA MATERIALIA, v.57, no.16, pp.4687 - 4696, 2009-09

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