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Intrinsic Mechanical Properties of Free-Standing SiNx Thin Films Depending on PECVD Conditions for Controlling Residual Stress Oh, Seung Jin; Ma, Boo Soo; Yang, Chanhee; Kim, Taek-Soo, ACS APPLIED ELECTRONIC MATERIALS, v.4, no.8, pp.3980 - 3987, 2022-08 |
Mechanical characterization of thin films via constant strain rate membrane deflection experiments Kim, Hojang; Choi, Jae Hoon; Park, Yuhyun; Choi, Sunkun; Sim, Gi-Dong, JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, v.173, 2023-04 |
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