Browse "ME-Journal Papers(저널논문)" by Author Yang, Chanhee
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| Intrinsic Mechanical Properties of Free-Standing SiNx Thin Films Depending on PECVD Conditions for Controlling Residual Stress Oh, Seung Jin; Ma, Boo Soo; Yang, Chanhee; Kim, Taek-Soo, ACS APPLIED ELECTRONIC MATERIALS, v.4, no.8, pp.3980 - 3987, 2022-08 |
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