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Evaluating Mechanical Properties of 100nm-Thick Atomic Layer Deposited Al2o3 as a Free-Standing Film Koo, Junmo; Lee, Sangmin; Kim, Junmo; Kim, Dong Hwan; Choi, Byoung-Ho; Kim, Taek-Soo; Shim, Joon Hyung, SCRIPTA MATERIALIA, v.187, pp.256 - 261, 2020-10 |
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