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Results 1-10 of 16 (Search time: 0.007 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Effects of substrate bias voltage on plasma parameters in temperature control using a grid system

Bai, KH; Hong, JI; You, SJ; Chang, Hong-Young, PHYSICS OF PLASMAS, v.8, no.9, pp.4246 - 4250, 2001-09

2
Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma

You, SJ; Kim, HC; Chung, CW; Chang, Hong-Young; Lee, JK, JOURNAL OF APPLIED PHYSICS, v.94, pp.7422 - 7426, 2003-12

3
Electron and ion kinetics in magnetized capacitively coupled plasma source

Lee, SH; You, SJ; Chang, Hong-Young; Lee, JK, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.25, pp.455 - 463, 2007-05

4
Driving frequency effect on electron heating mode transition in capacitive discharge

You, SJ; Ahn, SK; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.477 - 494, 2006-10

5
Study on the mode transitions for rf power dissipation in capacitively coupled plasma

You, SJ; Ahn, SK; Chang, Hong-Young, SURFACE & COATINGS TECHNOLOGY, v.193, pp.81 - 87, 2005-04

6
Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition

Ahn, SK; You, SJ; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.928 - 936, 2006-10

7
Control of negative ion density in SF6/Ar capacitive discharges

You, SJ; Kim, SS; Chang, Hong-Young, PHYSICS OF PLASMAS, v.12, pp.317 - 324, 2005-08

8
Role of transverse magnetic field in the capacitive discharge

You, SJ; Hai, TT; Park, M; Kim, DW; Kim, JH; Seong, DJ; Shin, YH; Lee, SH; Park, GY; Lee, JK; Chang, Hong-Young, THIN SOLID FILMS, v.519, pp.6981 - 6989, 2011-08

9
Control of electron density and temperature with a modified capacitive discharge

You, SJ; Bai, KH; Chae, SH; Chang, Hong-Young, PLASMA CHEMISTRY AND PLASMA PROCESSING, v.25, pp.245 - 254, 2005-06

10
Paradoxical sheath width variation in transversely magnetized capacitive coupled plasma

You, SJ; Bai, KH; In, JH; Chang, Hong-Young; Choi, CK, SURFACE & COATINGS TECHNOLOGY, v.171, pp.226 - 230, 2003-07

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