Search
Results 21-30 of 32 (Search time: 0.006 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| On anomalous temporal evolution of gas pressure in inductively coupled plasma Seo, Byong-Hoon; You, S. J.; Kim, J. H.; Seong, D. J.; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.102, no.13, pp.134104, 2013-04 | |
| Research of non-uniformity in 450 mm multi-electrode capacitive coupled plasma Park, Gi Jung; Lee, Yoon Seong; Seo, Sang Hoon; Chung, Chin Wook; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.293 - 298, 2013-11 | |
| The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma Lee, HunSu; Kim, EunAe; Lee, YunSeong; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.289 - 292, 2013-11 | |
| Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering Seo, Byong-Hoon; You, S. J.; Kim, J. H.; Seong, D. J.; Shin, Y. H.; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.52 - 56, 2013-11 | |
| Development of multiple inductively coupled plasma sources using coaxial transmission line for large-area processes Lee, Jin-Won; An, Sang-Hyuk; Kim, J. H.; Lee, Yun-Seong; Chang, Hong-Young, CURRENT APPLIED PHYSICS, v.16, no.3, pp.415 - 420, 2016-03 | |
| The discharge condition to enhance electron density of capacitively coupled plasma with multi-holed electrode Lee, Hun-Su; Lee, Yun-Seong; Chang, Hong-Young, PHYSICS OF PLASMAS, v.19, no.9, 2012-09 | |
| On the plasma uniformity of multi-electrode CCPs for large-area processing Jung, Park Gi; Hoon, Seo Sang; Wook, Chung Chin; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.5, 2013-10 | |
| A study on asymmetric current in plasma-mediated electrosurgery Seol, Youbin; Kim, J. H.; Na, Byung-Keun; You, S. J.; Choi, EH; Chang, Hong-Young, CURRENT APPLIED PHYSICS, v.15, no.3, pp.169 - 173, 2015-03 | |
| On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes Lee, Jinwon; Lee, Yun-Seong; Chang, Hong-Young; An, Sang-Hyuk, PHYSICS OF PLASMAS, v.21, no.8, 2014-08 | |
| Micro-arc ignition on the oily surface of capacitively-coupled plasma Kim, Yonghoon; Lee, Hunsu; Chang, Hong-Young, CURRENT APPLIED PHYSICS, v.15, no.3, pp.313 - 318, 2015-03 |