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Results 1-4 of 4 (Search time: 0.004 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Power dissipation and mode transition in an RF discharge with multi-hollow cathode electrode

Lee, Yun-Seong; Lee, Hun-Su; Chang, Hong-Young, THIN SOLID FILMS, v.518, pp.6682 - 6685, 2010-09

2
The trend of electron temperature and electron density in the process of microcrystalline silicon solar cells

Lee, Yun-Seong; In, Jung-Hwan; Ahn, Seung-Kyu; Seo, Sang-Hun; Chang, Hong-Young; You, Dong-Joo; Ahn, Seh-Won; Lee, Heon-Min, CURRENT APPLIED PHYSICS, v.10, pp.S234 - S236, 2010-03

3
On the plasma uniformity of multi-electrode CCPs for large-area processing

Jung, Park Gi; Hoon, Seo Sang; Wook, Chung Chin; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.5, 2013-10

4
On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

Lee, Jinwon; Lee, Yun-Seong; Chang, Hong-Young; An, Sang-Hyuk, PHYSICS OF PLASMAS, v.21, no.8, 2014-08

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