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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Role of transverse magnetic field in the capacitive discharge You, SJ; Hai, TT; Park, M; Kim, DW; Kim, JH; Seong, DJ; Shin, YH; Lee, SH; Park, GY; Lee, JK; Chang, Hong-Young, THIN SOLID FILMS, v.519, pp.6981 - 6989, 2011-08 | |
Collisional effect on the time evolution of ion energy distributions outside the sheath during the afterglow of pulsed inductively coupled plasmas Lee, J. B.; Chang, Hong-Young; Seo, S. H., PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.6, 2013-12 | |
The discharge condition to enhance electron density of capacitively coupled plasma with multi-holed electrode Lee, Hun-Su; Lee, Yun-Seong; Chang, Hong-Young, PHYSICS OF PLASMAS, v.19, no.9, 2012-09 |
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