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Results 11-20 of 75 (Search time: 0.003 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges Kim, SS; Chung, CW; Chang, Hong-Young, THIN SOLID FILMS, v.435, pp.72 - 77, 2003-07 | |
| Nonlocal electron kinetics in a planar inductive helium discharge Seo, SH; Chung, CW; Hong, JI; Chang, Hong-Young, PHYSICAL REVIEW E, v.62, no.5, pp.7155 - 7167, 2000-11 | |
| Electron and ion kinetics in magnetized capacitively coupled plasma source Lee, SH; You, SJ; Chang, Hong-Young; Lee, JK, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.25, pp.455 - 463, 2007-05 | |
| Control of ion species in inductively coupled oxidation plasma by inert gas mixing Bai, KH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.100, pp.443 - 448, 2006-12 | |
| Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge Ahn, Seung Kyu; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.93, no.3, 2008-07 | |
| Driving frequency effect on electron heating mode transition in capacitive discharge You, SJ; Ahn, SK; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.477 - 494, 2006-10 | |
| Study on the mode transitions for rf power dissipation in capacitively coupled plasma You, SJ; Ahn, SK; Chang, Hong-Young, SURFACE & COATINGS TECHNOLOGY, v.193, pp.81 - 87, 2005-04 | |
| Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition Ahn, SK; You, SJ; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.928 - 936, 2006-10 | |
| Experimental investigations of pulse-power-modulated inductive discharges Seo, SH; Chang, Hong-Young; Yang, WC; Kwon, JH; Kim, DH; Kim, YY; Nam, JH; Moon, SJ, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.48, pp.414 - 421, 2006-03 | |
| UV photon assist ionization for low temperature plasma Chae, SH; Seo, SH; Chang, Hong-Young, CURRENT APPLIED PHYSICS, v.6, pp.235 - 238, 2006-02 |