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| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Driving frequency effect on electron heating mode transition in capacitive discharge You, SJ; Ahn, SK; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.477 - 494, 2006-10 | |
| Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition Ahn, SK; You, SJ; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.928 - 936, 2006-10 | |
| Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.97, pp.335 - 347, 2005-01 | |
| Control of negative ion density in SF6/Ar capacitive discharges You, SJ; Kim, SS; Chang, Hong-Young, PHYSICS OF PLASMAS, v.12, pp.317 - 324, 2005-08 | |
| Control of electron density and temperature with a modified capacitive discharge You, SJ; Bai, KH; Chae, SH; Chang, Hong-Young, PLASMA CHEMISTRY AND PLASMA PROCESSING, v.25, pp.245 - 254, 2005-06 | |
| Efficient electron heating in short-pulsed magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.98, pp.1765 - 1773, 2005-10 | |
| Electron transport in the downstream region of planar unbalanced magnetron discharge Seo, SH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.1310 - 1317, 2004-08 | |
| Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.57 - 64, 2004-07 | |
| Effects of substrate bias on electron energy distribution in magnetron sputtering system Seo, Sang-Hun; In, Jung-Hwan; Chang, Hong-Young; Han, Jeon-Geon, PHYSICS OF PLASMAS, v.11, no.10, pp.4796 - 4800, 2004-10 |
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