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Results 1-10 of 12 (Search time: 0.004 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Development of a dual inductively coupled plasma source for direct and remote plasma generation in a reactor Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS REVIEW PAPERS, v.44, no.2, pp.1081 - 1085, 2005-02 | |
| Study on the mode transitions for rf power dissipation in capacitively coupled plasma You, SJ; Ahn, SK; Chang, Hong-Young, SURFACE & COATINGS TECHNOLOGY, v.193, pp.81 - 87, 2005-04 | |
| Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.97, pp.335 - 347, 2005-01 | |
| Control of negative ion density in SF6/Ar capacitive discharges You, SJ; Kim, SS; Chang, Hong-Young, PHYSICS OF PLASMAS, v.12, pp.317 - 324, 2005-08 | |
| Control of electron density and temperature with a modified capacitive discharge You, SJ; Bai, KH; Chae, SH; Chang, Hong-Young, PLASMA CHEMISTRY AND PLASMA PROCESSING, v.25, pp.245 - 254, 2005-06 | |
| Efficient electron heating in short-pulsed magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.98, pp.1765 - 1773, 2005-10 | |
| Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge Seo, SH; In, JH; Chang, Hong-Young; Han, JG, JOURNAL OF APPLIED PHYSICS, v.98, pp.8471 - 8477, 2005-08 | |
| Characterization of pulsed plasma in unbalanced magnetron argon discharge Lee, SW; Seo, SH; In, JH; Chung, CW; Chang, Hong-Young, PHYSICS OF PLASMAS, v.12, pp.297 - 301, 2005-06 | |
| Effect of duty cycle on plasma parameters in the pulsed dc magnetron argon discharge Seo, SH; In, JH; Chang, Hong-Young; Han, JG, APPLIED PHYSICS LETTERS, v.86, pp.361 - 376, 2005-06 | |
| Control and analysis of ion species in inductively coupled nitration plasma using a grid system Bai, KH; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.87, pp.299 - 308, 2005-09 |