Results 41-50 of 75 (Search time: 0.003 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
---|---|
Antenna configuration for uniform large-area inductively coupled plasma production Kim, SS; Chang, Hong-Young; Chang, Choong-Seock; Yoon, NS, APPLIED PHYSICS LETTERS, v.77, no.4, pp.492 - 494, 2000-07 | |
On a dual inductively coupled plasma for direct and remote plasma in a reactor Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, PHYSICS OF PLASMAS, v.11, pp.4830 - 4836, 2004-10 | |
Electron transport in the downstream region of planar unbalanced magnetron discharge Seo, SH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.1310 - 1317, 2004-08 | |
Experimental measurement of the electron energy distribution function in the radio frequency electron cyclotron resonance inductive discharge Chung, CW; Kim, SS; Chang, Hong-Young, PHYSICAL REVIEW E, v.69, pp.97 - 102, 2004-01 | |
Low energy electron cooling induced by a magnetic field in high pressure capacitive radio frequency discharges You, SJ; Kim, SS; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.85, pp.4872 - 4874, 2004-11 | |
Electron temperature control with a small mesh number grid in inductively coupled plasmas Bai, KH; Choi, CK; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, pp.662 - 667, 2004-11 | |
Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.57 - 64, 2004-07 | |
Rotating plasma discharges of high-pressure molecular vapor using circularly polarized microwaves Kim, JJ; Ko, JT; Won, DH; Kim, JW; Kim, SS; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.84, pp.2769 - 2771, 2004-04 | |
Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, no.3, pp.409 - 419, 2004-08 | |
Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge Seo, SH; Chang, Hong-Young, PHYSICS OF PLASMAS, v.11, pp.3595 - 3601, 2004-07 |