Results 1-3 of 3 (Search time: 0.006 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Review of heating mechanism in inductively coupled plasma Seo, SH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.131, no.1-3, pp.1 - 11, 2000-09 | |
Experimental investigation of plasma dynamics in dc and short-pulse magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.15, pp.256 - 265, 2006-05 | |
The finite size effect in a planar inductively coupled plasma Chung, CW; Kim, SS; Seo, SH; Chang, Hong-Young; Yoon, NS, JOURNAL OF APPLIED PHYSICS, v.88, no.2, pp.1181 - 1183, 2000-07 |
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