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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.97, pp.335 - 347, 2005-01 | |
Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.57 - 64, 2004-07 | |
Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, no.3, pp.409 - 419, 2004-08 |
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