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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Collisional effect on the time evolution of ion energy distributions outside the sheath during the afterglow of pulsed inductively coupled plasmas Lee, J. B.; Chang, Hong-Young; Seo, S. H., PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.6, 2013-12 | |
Research of non-uniformity in 450 mm multi-electrode capacitive coupled plasma Park, Gi Jung; Lee, Yoon Seong; Seo, Sang Hoon; Chung, Chin Wook; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.293 - 298, 2013-11 |
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