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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Effective design of multiple hollow cathode electrode to enhance the density of rf capacitively coupled plasma Lee, Hun-Su; Lee, Yun-Seong; Seo, S. H.; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.97, no.8, 2010-08 | |
Time evolution of electronegativity in a pulsed inductively coupled oxygen plasma Lee, Jeong-Beom; Seo, Sang-Hun; Chang, Hong-Young, THIN SOLID FILMS, v.518, pp.6573 - 6577, 2010-09 |
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