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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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On the plasma uniformity of multi-electrode CCPs for large-area processing Jung, Park Gi; Hoon, Seo Sang; Wook, Chung Chin; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.5, 2013-10 |
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