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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Experimental investigation of plasma dynamics in dc and short-pulse magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.15, pp.256 - 265, 2006-05 | |
Characterization of a high-frequency inductively coupled plasma source Lee, DS; Jun, HS; Chang, Hong-Young, THIN SOLID FILMS, v.506, pp.469 - 473, 2006-05 |
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