Search
Results 1-4 of 4 (Search time: 0.005 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Study on the mode transitions for rf power dissipation in capacitively coupled plasma You, SJ; Ahn, SK; Chang, Hong-Young, SURFACE & COATINGS TECHNOLOGY, v.193, pp.81 - 87, 2005-04 | |
| Control of negative ion density in SF6/Ar capacitive discharges You, SJ; Kim, SS; Chang, Hong-Young, PHYSICS OF PLASMAS, v.12, pp.317 - 324, 2005-08 | |
| Control of electron density and temperature with a modified capacitive discharge You, SJ; Bai, KH; Chae, SH; Chang, Hong-Young, PLASMA CHEMISTRY AND PLASMA PROCESSING, v.25, pp.245 - 254, 2005-06 | |
| Feature of electron energy distribution in a low-pressure capacitive discharge You, SJ; Chung, CW; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.87, pp.3751 - 3762, 2005-07 |
Discover
Type
- 4 Article