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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Three-step decay of the plasma density near the substrate in pulsed-dc magnetron sputtering discharge In, Jung Hwan; Na, Byung Keun; Seo, SH; Chang, Hong-Young; Han, JG, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.18, 2009-11 |
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