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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Seo, SH; In, JH; Chang, Hong-Young; Han, JG, JOURNAL OF APPLIED PHYSICS, v.98, pp.8471 - 8477, 2005-08

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