Results 1-2 of 2 (Search time: 0.003 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
---|---|
On a dual inductively coupled plasma for direct and remote plasma in a reactor Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, PHYSICS OF PLASMAS, v.11, pp.4830 - 4836, 2004-10 | |
Experimental measurement of the electron energy distribution function in the radio frequency electron cyclotron resonance inductive discharge Chung, CW; Kim, SS; Chang, Hong-Young, PHYSICAL REVIEW E, v.69, pp.97 - 102, 2004-01 |
Discover