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Results 11-11 of 11 (Search time: 0.006 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
11
Low dielectric constant CF/SiOF composite film deposition in a helicon plasma reactor

Yun, SM; Chang, Hong-Young; Kang, MS; Choi, CK, THIN SOLID FILMS, v.341, no.1-2, pp.109 - 111, 1999-03

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