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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma You, SJ; Kim, HC; Chung, CW; Chang, Hong-Young; Lee, JK, JOURNAL OF APPLIED PHYSICS, v.94, pp.7422 - 7426, 2003-12 | |
On inductively coupled plasmas for next-generation processing Lee, YK; Lee, DS; Bai, KH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.169, pp.20 - 23, 2003-06 | |
Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges Kim, SS; Chung, CW; Chang, Hong-Young, THIN SOLID FILMS, v.435, pp.72 - 77, 2003-07 |
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