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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Low dielectric constant CF/SiOF composite film deposition in a helicon plasma reactor Yun, SM; Chang, Hong-Young; Kang, MS; Choi, CK, THIN SOLID FILMS, v.341, no.1-2, pp.109 - 111, 1999-03 |
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