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Results 1-1 of 1 (Search time: 0.004 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges

Kim, SS; Chung, CW; Chang, Hong-Young, THIN SOLID FILMS, v.435, pp.72 - 77, 2003-07

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