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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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The finite size effect in a planar inductively coupled plasma Chung, CW; Kim, SS; Seo, SH; Chang, Hong-Young; Yoon, NS, JOURNAL OF APPLIED PHYSICS, v.88, no.2, pp.1181 - 1183, 2000-07 |
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