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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma You, SJ; Kim, HC; Chung, CW; Chang, Hong-Young; Lee, JK, JOURNAL OF APPLIED PHYSICS, v.94, pp.7422 - 7426, 2003-12 |
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