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A cutoff probe for the measurement of high density plasma You, Kwang-Ho; You, S. J.; Kim, D. W.; Na, Byung-Keun; Seo, Byong-Hoon; Kim, J. H.; Shin, Y. H.; et al, THIN SOLID FILMS, v.547, pp.250 - 255, 2013-11 |
Evolution of electron temperature in low pressure magnetized capacitive plasma You, S. J.; Park, G. Y.; Kwon, J. H.; Kim, J. H.; Chang, Hong-Young; Lee, J. K.; Seong, D. J.; et al, APPLIED PHYSICS LETTERS, v.96, no.10, 2010-03 |
Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering Seo, Byong-Hoon; You, S. J.; Kim, J. H.; Seong, D. J.; Shin, Y. H.; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.52 - 56, 2013-11 |
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