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Measurement of electron density using reactance cutoff probe You, KH; You, SJ; Kim, Dae Woong; Na, Byungkeun; Seo, BH; Kim, JH; Seong, DJ; et al, PHYSICS OF PLASMAS, v.23, no.5, 2016-05 |
Role of transverse magnetic field in the capacitive discharge You, SJ; Hai, TT; Park, M; Kim, DW; Kim, JH; Seong, DJ; Shin, YH; et al, THIN SOLID FILMS, v.519, pp.6981 - 6989, 2011-08 |
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