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Browse "PH-Journal Papers(저널논문)" by Author Seo, Sang Hoon

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1	Research of non-uniformity in 450 mm multi-electrode capacitive coupled plasma Park, Gi Jung; Lee, Yoon Seong; Seo, Sang Hoon; Chung, Chin Wook; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.293 - 298, 2013-11

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