Browse "PH-Journal Papers(저널논문)" by Author See, SH
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| The deposition of SiOF film with low dielectric constant in a helicon plasma source Kim, JH; See, SH; Yun, SM; Chang, Hong-Young; Lee, KM; Choi, CK, APPLIED PHYSICS LETTERS, v.68, no.11, pp.1507 - 1509, 1996-03 |
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