Browse "PH-Journal Papers(저널논문)" by Author Lee, DS
Showing results 1 to 3 of 3
| Characterization of a high-frequency inductively coupled plasma source Lee, DS; Jun, HS; Chang, Hong-Young, THIN SOLID FILMS, v.506, pp.469 - 473, 2006-05 |
| Control and analysis of ion species in N-2 inductively coupled plasma with inert gas mixing Bai, KH; Lee, DS; Chang, Hong-Young; Uhm, HS, APPLIED PHYSICS LETTERS, v.80, no.21, pp.3907 - 3909, 2002-05 |
| On inductively coupled plasmas for next-generation processing Lee, YK; Lee, DS; Bai, KH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.169, pp.20 - 23, 2003-06 |
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