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The nonlocal and local property of the electron energy distribution function in a low-pressure inductively coupled plasma Chung, C; Chang, Hong-Young, PHYSICS OF PLASMAS, v.7, no.9, pp.3826 - 3828, 2000-09 |
The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma Chung, C; Seo, SH; Chang, Hong-Young, PHYSICS OF PLASMAS, v.7, no.9, pp.3584 - 3587, 2000-09 |
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