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Comparison of the effective oxide thickness determined by ellipsometry with the result by medium energy ion scattering spectroscopy and high-resolution transmission electron microscopy Cho, HM; Lee, YW; Lee, IW; Moon, DW; Kim, BY; Kim, HJ; Kim, Byoung Yoon; et al, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.19, no.4, pp.1144 - 1149, 2001 |
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