Browse "PH-Journal Papers(저널논문)" by Author Oh, KS

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Low-dielectric-constant-film deposition with various gases in a helicon plasma reactor

Yun, SM; Chang, Hong-Young; Oh, KS; Choi, CK, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.38, no.7B, pp.4531 - 4534, 1999-07

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