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전자 싸이클로트론 공명 플라즈마 화학증착법에 의한 실리콘 질화막 형성 및 특성연구

Yong-Jin Kim; Jung-Hyung Kim; Sun-Kyu Song; Hong-Young Chang, 한국표면공학회지, v.25, no.6, pp.287 - 292, 1992

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