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High-speed measurement of three-dimensional surface profiles up to 10 mu m using two-wavelength phase-shifting interferometry utilizing an injection locking technique Jang, Ro-Ma; Kang, Chu-Shik; Kim, Jong-Ahn; Kim, Jae-Wan; Park, Hae-Yong, APPLIED OPTICS, v.50, no.11, pp.1541 - 1547, 2011-04 |
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