집적 광학용 격자구조의 제작과 응용

Abstract

Submicron gratings are fabricated holographically on thin film single mode and multimode waveguides. Thin film waveguides are made by spin-coating polyurethane solution on the substrates of microscope slide glass and Corning 7059 glass. In order to characterize thin film waveguides, the refract사e index and the thickness of thin films are measured by using the m-line spectroscopy. The fabricated gratings are tested as a grating coupler, a mode converter, and a beam splitter. Also chirped gratings are fabricated to observe beam expansion phenomena and thus the possibility of the wavelength demultiplexing.