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In Situ Nanolithography with Sub-10 nm Resolution Realized by Thermally Assisted Spin-Casting of a Self-Assembling Polymer

Lee, Jung Hye; Kim, YongJoo; Cho, Joong-Yeon; Yang, Se Ryeun; Kim, Jong Min; Yim, Soonmin; Lee, Heon; et al, ADVANCED MATERIALS, v.27, no.33, pp.4814 - 4822, 2015-09

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