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Fabrication of a High-Performance Poly-Si Thin-Film Transistor Using a Poly-Si Film Prepared by Silicide-Enhanced Rapid Thermal Annealing Process

Yang, Yong Ho; Ahn, Kyung Min; Kang, Seung Mo; Mun, Seonhong; Ahn, Byung-Tae, ELECTRONIC MATERIALS LETTERS, v.10, no.6, pp.1081 - 1085, 2014-11

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