DSpace at KOASAS
Browsing DSpace

Browse "MS-Journal Papers(저널논문)" by Subject VAPOR-DEPOSITED TIN

A to Z

All 0-9

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

or enter first few letters:

Showing results 1 to 1 of 1

1
Influence of vacuum-annealing on the diffusion barrier properties of MOCVD TiN for Cu metallization

Lee, JG; Cho, HL; Lee, E; Lee, JeongYong; Kim, K; Lee, JM, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.35, pp.S65 - S70, 1999-07

Discover

Type

Open Access

Date issued

. next

Subject

. next

rss_1.0 rss_2.0 atom_1.0