Browse "MS-Journal Papers(저널논문)" by Subject SAW DEVICES
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| Integration of piezoelectric aluminum nitride and ultrananocrystalline diamond films for implantable biomedical microelectromechanical devices Zalazar, M.; Gurman, P.; Park, J.; Kim, D.; Hong, Daniel Seungbum; Stan, L.; Divan, R.; et al, APPLIED PHYSICS LETTERS, v.102, no.10, 2013-03 |
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